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NEMSIC addresses the future intelligent sensor and
actuator systems in which solid-state semiconductor micro/nanodevices and
micro/nano-mechanical devices are co-integrated for new functionalities and
increased performance.
The project proposes the exploration and development of low power sensing
micro/nanosystems based on Nano-Electro-Mechanical (NEM) structures
integrated on a Silicon-On-Insulator (SOI) or Silicon-On-Nothing (SON)
technological platform. The applications that drive the technological NEM-based
smart system demonstrators are gas (COx, NOx, SOx) and biological sensing
(DNA, proteins and other molecules), dedicated to critical environment
monitoring and applications in the fields of genetics, pharmacology and drug
discovery.
Continued below .......
NEM technology will be combined with silicon CMOS technology involving
novelty and scientific/technical challenges at three levels:
- system level, addressing the challenge of true nano-micro interfaces,
where signals detected by arrays of nanostructures are processed by smartly
designed low power CMOS circuitry,
- device level, where novel true hybrid NEM-FET devices support new highly
sensitive detection scheme and power management via sleep switches and
- technology level, where nanotechnology processes (top down processed
nanobeams and nanogaps, featuring sub-100nm dimensions) will be developed
and combined with advanced functionalization techniques for dedicated
sensing that stays compatible with CMOS in future IC-embedded or post-IC
approaches.
The reliability of the NEM structures, combined with prospects for 0-level
packaging are studied as key challenges for the success of such Nano-electro-mechanical-system-integrated-circuits
(NEMSIC).
Finally, NEMSIC is expected to provide the end-users with flexible design
methodologies based on advanced but well-controlled SOI or SON technology
platforms, with predictable performances and associated cost effectiveness.
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